广泛应用于真空腔体动态密封(如刻蚀机、薄膜沉积设备)以维持高真空环境,高纯化学品输送系统(如湿法清洗设备)实现强酸/强碱流体的零泄漏传输,以及精密温控装置(如快速退火设备、EUV光刻机冷却模块)确保极端温度下的稳定密封性能。
Widely used in dynamic sealing of vacuum chambers(such as etcher,thin film deposition equipment)to maintain a high vacuum environment,high-purity chemical delivery systems(such as wet cleaning equipment)to achieve zero leak-age transmission of strong acid/strong alkali fluids,and precision temperature control devices (such as rapid annealing equipment,EUV lithography machine cooling modules)to ensure stable sealing performance under extreme tempera-tures.
设计特点及优势
Design Features and Advantages
1
精准结构尺寸设计。
Precision dimensional measurement.
2
采用特有的橡胶与金属一体成型技术、表面涂覆技术、金属加工与脱脂技术、 特制胶黏剂及涂覆黏合技术。
The technology employs specialized rubber-metal integrated molding processes, surface coating techniques,metal processing and degreasing methods,along with customized adhesive formulations and coating adhesion technologies.
序号 量产清单
1 CS-OR-T091839-510-0010
2 CS-OR-T102863-016-0010厚
3 CS-OR-T102863-016-0010薄D-DEMO
4 CS-OR-T019090-374-1113
5 CS-OR-T019090-328-1113_DEMO
6 CS-OR-T019090-328-1113A_DEMO
7 CS-OR-T019090-328-0012
8 CS-OR-T102863-077-6068_DEMO
9 CS-OR-T019090-374-0013薄