广泛应用于真空腔体动态密封(如刻蚀机、薄膜沉积设备)以维持高真空环境,高纯化学品输送系统(如湿法清洗设备)实现强酸/强碱流体的零泄漏传输,以及精密温控装置(如快速退火设备、EUV光刻机冷却模块)确保极端温度下的稳定密封性能。
Widely used in dynamic sealing of vacuum chambers(such as etcher,thin film deposition equipment)to maintain a high vacuum environment,high-purity chemical delivery systems(such as wet cleaning equipment)to achieve zero leak-age transmission of strong acid/strong alkali fluids,and precision temperature control devices (such as rapid annealing equipment,EUV lithography machine cooling modules)to ensure stable sealing performance under extreme tempera-tures.